表面加工機および表面加工方法

Surface processing machine and surface processing method

Abstract

【課題】簡易な構成で、被加工材の表面位置を精密に検出が可能な表面加工機および表面加工方法を提供する。 【解決手段】駆動用ピエゾ圧電効果素子21の下側に設けられた検出用ピエゾ圧電効果素子22は、僅かに圧縮されるとピエゾ圧電効果によって電圧値が変化する。これにより、検出用ピエゾ圧電効果素子22の電圧値の変化を監視していれば、駆動用ピエゾ圧電効果素子21を伸長させて加工具23が被加工材9の表面9aに接した瞬間、即ち被加工材9の表面9aの位置を検出することができる。こうした検出用ピエゾ圧電効果素子22は、例えばフルストロークで9μm程度の伸縮が可能である。検出用ピエゾ圧電効果素子22は、例えば薄いピエゾ圧電効果膜を多数積層して形成した積層型ピエゾ圧電効果素子であり、素子全体として0.2〜0.3μm程度の圧縮で電圧変化を観察することが可能である。 【選択図】 図2
PROBLEM TO BE SOLVED: To provide a surface processing machine in which the surface position of a material to be processed can be accurately detected with a simple constitution, and a surface processing method. SOLUTION: A detecting piezoelectric effect element 22 is provided on the lower side of a driving piezoelectric effect element 21. A voltage value of the detecting piezoelectric effect element 22 is changed by the piezoelectric effect when slightly compressed. Therefore, if the changes of the voltage value of the detecting piezoelectric effect element 22 are monitored, the position of the surface 9a of the material 9 to be processed can be detected when a processing tool 23 is brought into contact with the surface 9a of the material 9 to be processed by elongating the driving piezoelectric effect element 21. Such a detecting piezoelectric effect element 22, for example, can be expanded/contracted about 9 μm to the full stroke. The detecting piezoelectric effect element 22, for example, is a laminated piezoelectric effect element which is formed by laminating a large number of thin piezoelectric effect films. The voltage changes can be observed with the compression of about 0.2-0.3 μm as the whole element. COPYRIGHT: (C)2005,JPO&NCIPI

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